Arenal PCS produces CMP Slurry Analysers for the semicon/TFT/LCD industry. The Analyser consists of the process control Analyser and a teflon flow block with ultrasonic spectroscopy sensors. The CMP slurry flows througth the blocks to the wafers. Meanwhile the quality of the slurry is continuously monitored to reduce for risks of scratches on the surface of the wafers.
Ultrasonic spectroscopy is a acoustical physical property technology, offering long term stability. High energy pulses are induced into the piezo element: an ultrasonic wave arises and propagates through the sensor and the slurry: the reflections from the the interface between the element and the slurry, as well as from the reflector are measured. Their properties change due to the temperature and the properties of the slurry, of which density is one of. All acoustic properties are read by the process control Analyser (PCA). In the PCA the concentration of the slurry is calculated. Learn more about the technology here.
One or more ceramic probes can be mounted in QB1 blocks, made from PTFE.
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